Tesi di LAUREA SPECIALISTICA Titolo Modellazione e simulazione di fenomeni di adesione in mocrosistemi Data 2010-05-03 Autore/i Arosio, Daniele Relatore Corigliano, A. Relatore Frangi, A. Correlatore Ardito, R. Full text non disponibile Abstract In this thesis the adhesion phenomena in the Micro Electro Mechanical Systems (MEMS) has been studied and simulated. Adhesion in these microdevices is strongly influenced by the surface rugosity of structures composing MEMS. A wide part of this work concerns the description of surface rugosity, its characterization by means of appropriate statistical quantities and, above all, the study of methods used for the numerical generation of surfaces with the desired rugosity. A second part deals with the simulation of the adhesion phenomena, due to van der Waals interactions and capillary forces, between two rough surfaces. I have used a tridimensional Finite Elements model, in order to evaluate how roughness and the presence of asperities influence the value of adhesion energy. The last part is dedicated to the investigation of the formation and the geometrical conguration of a water meniscus between two asperities, through a membrane Finite Elements model. As a result, it was formulated a model to predict the capillary adhesion forces, with the aim of employing it in the simulations of tridimensional surface adhesion.